Investigation and progress about micro plasma source of optical spectrometer
This paper introduces several micro optical spectrometer source based on micro electro mechanical system(MEMS)technology.Firstly,it introduces a MEMS based microfabricated Inductively Coupled Plasma(ICP) Source whose structure mainly consists of a planar spiral-shaped coil with diameter of 5 mm and a planar interdigitated resonance capacitor,with the RF excitation power of a frequency of 450 MHz and a power efficiency of 3W,the argon can be ionized to plasma in the pressure of 100Pa.Secondly,it presents a PCB based Micro ICP Source designed by author.When the pressure is 100Pa and the RF power is 3.5W,13.56MHz,the novel ICP is ignited.Thirdly,it also describes a Microwave Induced Plasma(MIP)source, whose main structure is a split-ring resonator.The device is sufficient to initiate a plasma from air excitated with a frequency of 895 MHz and a power efficiency of 3W in atmospheric pressure air.Finally,it presents the application of micro generator.
Optical Spectrometer Source Inductively Coupled Plasma (ICP) Microwave Induced Plasma(MIP) MEMS
Wang Yongqing Cai Ailing Sun Rongxia Pu Yongni Li Xiaojia
College of Electronic &Informational Engineering,Hebei University Heibei Baoding 071002 China;Centra College of Electronic &Informational Engineering,Hebei University Heibei Baoding 071002 China Central Iron &Steel Research Institute,National Testing Center of Iron &Steel Beijing 100081 China
国际会议
西安
英文
2007-08-16（万方平台首次上网日期，不代表论文的发表时间）