Investigation and Progress of Micro-Spectrometer’s Light Splitting System

摘要：

It becomes possible to micro spectrometers with the development of micromachining techniques such as MEMS (Micro Electro Mechanical Systems).According to different dispersive elements used by micro spectrometers,the paper mainly illuminates the principle and fabrication technology of typical micro spectrometers whose dispersive elements adopt silicon micro grating,filter and Febry-Perot resonant cavity. The paper briefly summarizes the advantages,disadvantages and application of the micro spectrometers.In addition,it shows the interrelated parameter indexes of these micro spectrometers.Many potential applications where needing poor resolving power of wavelength are predicted.The development tendency of micro spectrometers is also presented.

关键词： micro spectrometer light splitting system MEMS grating filter resonant cavity

作者: Wang Yongqing Li Chunli Sun Rongxia Wang Haizhou

作者单位: College of Electronic &Informational Engineering,Hebei University.Hebei Baoding,071002,China;Central College of Electronic &Informational Engineering,Hebei University.Hebei Baoding,071002,China Central Iron &Steel Research Institute,National Testing Center of Iron &Steel.Beijing,100081,China

会议类型: 国际会议

会议名称: 第八届国际电子测量与仪器学术会议(Proceedings of 2007 8th International Conference on Electronic Measurement & Instruments)

会议地点: 西安

会议语种:英文

在线出版日期: 2007-08-16（万方平台首次上网日期，不代表论文的发表时间）