On Applications of IE in Semiconductor Manufacturing
Semiconductor wafer fabrication system ( SWFS) is one of the most complex manufacturing processes today. Reentrant process flows, diverse types of equipments, complex production processes and unpredictable yield and e-quipment downtime make the planning and controlling of SWFS difficult. In order to cope with such challenges, different kinds of IE methods have been applied in various fields such as modeling and simulation, layout design and capacity planning, production planning and scheduling and product and equipment availability. In this presentation, state of arts and trends in above areas are summarized, and progress made by Department of Industrial Engineering & Management since 2001 are reported, which are supported by some national level findings and in collaboration with some semiconductor enterprise in Shanghai. Moreover, suggestion on deepening and widening the application of IE methods in semiconductor manufacturing is also made.
Industrial Engineering Semiconductor Wafer Fabrication System (SWFS) State of Arts Trend Progress.
Jiang Zhibin
Shanghai Jiaotong University, Shanghai P.R.China, 200240
国际会议
天津
英文
2007-10-20（万方平台首次上网日期，不代表论文的发表时间）