Ultrasonic Applied in Super Precision polishing of Magnetic Recording Heads
In the traditionary nanogrinding way, a sub-nanometer smooth surface can be achieved, but the PTR can be only controlled under ten nanometers. To find a new way to reduce the PTR, ultrasonic was applied in the polishing experiment.At first, the experiment with two kinds of samples, AlTiC bulk and NiFe bulk were carried out in free abrasive lapping way with the float-piece polisher. It was discovered that the material removal rate and the roughness of surface is improved in different extent of different material. the material removal rate (MRR) of the AlTiC bulk was increased from 10nm/m to 16nm/m, while the MRR of the NiFe bulk was increased from 23nm/m to 30nm/m. Encouraged by the result of the experiment, the specimen of 70mm*1.25mm rowbar with 60 GMR magnetic head was polished in the same condition, as a result, the PTR was reduced from 65nm to 45nm. Furthermore, the ultrasonic was introduced into nanogrinding of recording head. In this way, the PTR was controlled at 1nm or so and smoother surface was achieved.Two kinds of mechanism about the role of the ultrasonic were prompt to explain in what way that the material removal rate is improved and why the improved ratio is different in different materials in the polishing.
Rulin Shen Jue Zhong
School of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
国际会议
第八届电子封装技术国际会议(2007 8th International Conference on Electronics Packaging Technology ICEPT2007)
上海
英文
474-477
2007-08-14（万方平台首次上网日期，不代表论文的发表时间）