A Novel Electro-Optical Magnetic Microsensor with Reducing Interference Packaging

摘要：

A novel electro-optical magnetic microsensor with reducing interference packaging mechanism for sensing magnetic field strength is demonstrated. Both capacitive and optical fiber sensing microstructures surrounded magnetic shields are fabricated in a chip using low temperature silicon-based MEMS compatible technology.Varied NiFe permalloy flaps embedded on polyimide membranes were used as flexible sensing mechanisms to actuate side-polished fiber and capacitor plate. The fiber Bragg gratings are used as optical sensors with high sensitivity. Results of simulations and experiments show that the structures can reduce interference and then increasing sensitivity and performance effectively. A sensitivity of 0.35nm/T is achieved by evaluating the peak shift of Bragg wavelength excited by Nd-Fe-B magnets with residual magnetic strength up to 1.12 T

关键词： Magnetic microsensor Fiber Bragg grating,Capacitive sensor Optical sensor Microsensor packaging

作者: Hsing-Cheng Chang San-Shan Hung Chingfu Tsou Wen-Fung Liu Chi-Chih Lai Ching-Shang Jian

作者单位: Department of Automatic Control Engineering,Feng Chia University, Taichung, 40724 Taiwan, China Department of Electrical Engineering,Feng Chia University, Taichung, 40724 Taiwan, China

会议类型: 国际会议

会议名称: 第八届电子封装技术国际会议(2007 8th International Conference on Electronics Packaging Technology ICEPT2007)

会议地点: 上海

会议语种:英文

页码: 536-539

在线出版日期: 2007-08-14（万方平台首次上网日期，不代表论文的发表时间）