MICROSTRUCTURE AND PROPERTIES OF ANTIMONY-DOPED TIN OXIDE THIN FILM DEPOSITED BY SOL-GEL METHOD

摘要：

The antimony-doped tin (ATO) thin films were deposited on glass substrates with and without SiO2-coated by sol-gel process with annealing temperature of 450亷. The structural, electrical and optical properties of the thin films were studied in details. The X-ray diffraction (XRD) analysis revealed that the thin films retained the tetragonal rutile structure as undoped ones. The sheet resistivity decreased obviously with the increase of the thickness, which was around 129/仩 with the thickness of about 95nm. The average transmittance in the visible range was above 65％, and the reflectance in the infrared range for ATO films on Si substrates increased from 20％ to 40％ with the increase of the wavelength.

作者: Wang Yinling Xu Xueqing Xu Gang He Xinhua

作者单位: Guangzhou Institute of Energy Conversion Renewable Energy and Gas Hydrate Key Laboratory of Chinese South China University of Technology Material Institute Guangzhou 510640, China

会议类型: 国际会议

会议名称: 2007世界太阳能大会(Proceedings of ISES Solar World Congress 2007)

会议地点: 北京

会议语种:英文

在线出版日期: 2007-09-18（万方平台首次上网日期，不代表论文的发表时间）