TRANSPARENCY-REFORMING of Al-N FILM by HYDROTHERMAL REACTION

摘要：

The incompletely-nitrided Al-N sputtered films are deposited on glass substrates by the reactive sputtering method using Al target in the ambience of mixture gas of Ar and N2. As-deposited films are boiled in pure water. After 10 minutes boiling, the Al-N film becomes transparent in visible region up to the as-deposited film thickness of 300nm. The glass substrate with a boiled transparent film shows larger transmittance than a glass substrate itself. Additionally, the transmittance of a glass substrate with transparent films on both surfaces is improved more. These optical properties are thought to be useful for the suppression of energy loss due to the reflection in ordinary optical devices, e.g., solar cell.

作者: Takashi Ishiguro Daisuke Hattori Katsuyoshi Hamasaki

作者单位: Department of Materials Science and Technology, Tokyo University of Science, 2641, Yamazaki, Noda, C Department of Electrical Electronics and Information Engineering, Nagaoka University of Technology,

会议类型: 国际会议

会议名称: 2007世界太阳能大会(Proceedings of ISES Solar World Congress 2007)

会议地点: 北京

会议语种:英文

在线出版日期: 2007-09-18（万方平台首次上网日期，不代表论文的发表时间）