A NEW APPROACH FOR INVESTIGATION OF STRUCTURAL PROPERTIES OF INDIUM TIN OXIDE THIN FILM

摘要：

It has been proved that the optical and electrical properties of indium tin oxide (ITO) thin film is strongly structural dependent, with the structural properties of the film varies for different film preparation condition. The ITO film has been prepared by RF sputtering and its transmission and conductivity have been optimized by annealing in the atmosphere of N2 at 400℃. A theoretical model based on the variation of electrical and optical band gap of the film for different preparation condition is developed and its validity has been verified by experimental results.

作者: A.Mohammadi Gheidari E.Asl Soleimani W.Shams-Kolahi

作者单位: Thin Film Laboratory, ECE Department, University of Tehran, P.O.Box 14395/515, Tehran, Iran Thin Film Laboratory, ECE Department, University of Tehran

会议类型: 国际会议

会议名称: 2007世界太阳能大会(Proceedings of ISES Solar World Congress 2007)

会议地点: 北京

会议语种:英文

在线出版日期: 2007-09-18（万方平台首次上网日期，不代表论文的发表时间）