Structural Properties of Ag Thin Film on Glass Substrate Prepared by Electron-Beam Vapor Deposition
Ag thin films were deposited onto glass substrate at different substrate temperatures by electron-beam vapor deposition. The microstructure and surface topographics of the deposited thin films were examined using atomic force microscope and scanning electron microscope. The mechanical properties such as hardness and Youngs modulus of film are characterized by nanoindentation techniques. The effects of film thickness and substrate temperatures on the microstructure and mechanical properties are studied. It is found that the grain size of Ag film is increasing as substrate temperature increase. As a result, the surface roughness of the film is also increased. The hardness and Youngs modulus increase with decreasing film thickness. In order to prevent the oxidation, a thin film was coated on the Ag surface. The effects of on the mechanical properties of Ag film were examined. The variation of the hardness and Youngs modulus of the film with the indentation depth were presented through experimental nanoindentation test.
electron-beam vapor deposition thin film microstructure nanoindentation test
Shiuh-Chuan Her Yi-Hsiang Wang
Dept.of Mechanical Engineering Yuan-Ze University 135 Yuan-Tung road Chung-Li, 320, Tao-Yuan Shian Taiwan
国际会议
郑州
英文
2007-10-23（万方平台首次上网日期，不代表论文的发表时间）