THE VIBRATION AND CONTROL OF MULTI-WIRE SAW

摘要：

Starting from effects on machining quality that vibration acts on silicon wafer, we know the importance of the control of wire-vibration in wafer cutting.Based the analysis of the system, the paper builds up Hamiltom principle system models, and analyzes it with the finite element method.Different parameters on the natural frequency results are given.Finally, this paper presents the active control of wire-vibration and the fuzzy control.The paper gives the general setting about the system parameters and reaches anticipated results.

关键词： Vibration Tension Hamiltom principle the finite element

作者: ZHI-HUA CHENG CHANG-KAI XU REN-QING PEI

作者单位: The School of Mechanical & Electronic and Automation, Shanghai University, Shanghai, 200072, China

会议类型: 国际会议

会议名称: 2007 International Conference on Machine Learning and Cybernetics(IEEE第六届机器学习与控制论国际会议)

会议地点: 香港

会议语种:英文

页码: 735-738

在线出版日期: 2007-08-19（万方平台首次上网日期，不代表论文的发表时间）