Design of 2D Flexible Hinge Stage with Multi-Parameter Feedback Control

摘要：

Based on modem control principles, a method of multi-parameter feedback control for 2D flexible hinge stage is presented. The structure of the stage is worked out in order to attach the sensors, which is applied to get the feedback signal. The structure is optimized with software of Ansys, the vibration model of the stage is involved.

作者: J H Zhang C R Xiao X D Yang

作者单位: Mechanical and electrical department of Xiamen university, Xiamen, 361005, China

会议类型: 国际会议

会议名称: 第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)

会议地点: 哈尔滨

会议语种:英文

页码: 233-238

在线出版日期: 2006-08-08（万方平台首次上网日期，不代表论文的发表时间）