Binary Channel SAW Mustard Gas Sensor Based on PdPc0.3PANI0.7 hybrid Sensitive Film
This paper discussed the working principle of binary channel surface acoustic wave (SAW) lithium niobate piezoelectric chip detecting mustard, established the mathematic model of beat frequency output △f and the mustard gas density δ. The MEMS cratt solved the parameters of the binary channel SAW chip such as its interdigital electrode number was 15～25 couple, width and spacing were both 25μm, degree of overlapping was 2mm, fundamental frequency was 10～35MHz, frequency-domain width was 5～20Hz, and its back pt hot films. According to TG-DSC thermal analysis, vacuum coating craft was adopted to solve the hybrid sensitive film forming craft parameter of PdPc0.3PANI0.7(phthalocyanine palladium0.3 Poiyaniline0.7).The micro-appearance of sensitive film was analyzed through SEM.The sensors sensitivity and response characteristic were tested and analyzed: appear linear change, its response time is less than 5min while its recovery time is less than 8min.
Y B Shi J J Xiang Q H Feng Z P Hu H Q Zhang J Y Guo
College of Measure-Control Technology and Communications Engineering, Harbin University of Science and Technology, China
国际会议
第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)
哈尔滨
英文
292-297
2006-08-08（万方平台首次上网日期，不代表论文的发表时间）