Modeling of Novel Modulated Helix Induction MEMS Switch on Time-Domain
In order to apply micro/nano technologies and Radio Frequency Micro/nano-Electro-Mechanical System (MEMS/NEMS) technologies in the Radio Frequency (RF)field to manufacture miniature, high isolation, low insertion loss, good linear characteristic and low power consumption microwave switches. Through analysis of electrics and mechanics of the RF switch, a novel MEMS helix induction modulated switch which working on 9GHz～20GHz is presented in this paper. The actuation voltage, insertion loss and isolation of the switch are 12V, 0.89dB@9.5GHz, 31.4dB@9.5GHz respectively. The alternating direction implicit finite-difference time-domain (ADI-FDTD) method for a full three-dimensional (3-D)wave presented is used for modeling and analyzing the micromachine switch for the first time.The numerical method is unconditionally stable. The limitation of the maximum the time-step size of the method does not depend on the CFL condition, but rather on numerical errors.Therefore, the time-step size can be arbitrarily set within numerical errors when this method is used. It is more efficient than the conventional finite element method (FEM) in terms of the central processing unit time if the size of the local minimum cell in the computational domain is much smaller than the other cells and the wavelength. Associated with practical model,Murs superabsorbing boundary condition was developed. Numerical simulation results are compared with those using the FEM and theoretic computation. It has been demonstrated that, with this technique, space discretization with only a few cells per wavelength gives accurate results, leading to a reduction of CPU computation time and improvement of computation efficiency.
W G Yu K Q Zhou T H Yang
Center of micro/nano electronics, Logistical Engineering University, Chongqing 400016, China Department of industrial engineering of Chongqing Institute University, 400050,China
国际会议
第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)
哈尔滨
英文
298-302
2006-08-08（万方平台首次上网日期，不代表论文的发表时间）