Nanometer Accuracy Amplitude Modulation Sensor Technique Used For Roundness Measurement

摘要：

This paper introduces the advantage of digital phase sensitivity demodulation technique based on analyzing the errors of the analog phase sensitivity demodulation technique.And the digital phase sensitivity demodulation technique is used in the amplitude modulation sensor circuit for roundness measurement. The digital phase sensitivity demodulation technique can simplify the circuit design and improve the reliability. The experiment shows the amplitude modulation sensor circuit using the digital phase sensitivity demodulation technique can reach nanometer precision, so it can be used to accomplish the high precision roundness measurement.

作者: H Zhang

作者单位: National Institute of Metrology, Beijing, 100013, China

会议类型: 国际会议

会议名称: 第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)

会议地点: 哈尔滨

会议语种:英文

页码: 734-738

在线出版日期: 2006-08-08（万方平台首次上网日期，不代表论文的发表时间）