Design Considerations and Finite Element Analysis of Piezoresistive Cantilever for low flow sensing applications
We present a design and finite element analysis for piezoresistive cantilever sensor. The mechanical analysis and design of piezoresistive cantilevers for flow sensing applications is studied. The change of relative resistivity of piezoresistive cantilevers has been analyzed for simple and paddle cantilever sensors. For a cantilever with specified spring constant and bandwidth requirements, the geometric dimensions of the cantilever were varied within certain constraints. The sensitivity of the sensing technique is studied. The calculated sensitivity ((△R/R)/y(0)) for simple cantilever sensor is 0.818-5.933×10-6/nm and for cantilever paddle sensor is 0.86-6.75×10-6/nm. These values fit well with the values predicted by finite element analysis (FEA)technique. These cantilever paddles have potential application in flow sensors.
finite element analysis piezoresistive cantilevers low flow sensitivity, stiffness and resonant frequency
Muhammad Akram Bhatti Changxi Li Ahmed N.Abd Alla
Department of Control Science and Engineering, Huazhong University of Science and Technology,Wuhan, College of Electric and Electronics Engineering, Huazhong University of Science and Technology
国际会议
杭州
英文
1209-1213
2006-10-12（万方平台首次上网日期，不代表论文的发表时间）