A New Method for Mapping Ultra-Shallow Junction Leakage Currents

摘要：

A method for mapping ultra-shallow junction (USJ) leakage currents at a selected bias voltage is pro-posed and its measurement principle is explained. Ex-perimental results on some samples in Borlands recent round robin experiment are shown and discussed. Com-parison with leakage measurement of the Sheet Resis-tance- Leakage Current (RsL) technique is made.

作者: James T C Chen Tatiana Dimitrova Dimitar Dimitrov

作者单位: Four Dimensions, Inc.3140 Diablo Ave., Hayward, California 94545

会议类型: 国际会议

会议名称: The Sixth International Workshop on Junction Technology(第六届国际结技术研讨会)

会议地点: 上海

会议语种:英文

在线出版日期: 2006-05-15（万方平台首次上网日期，不代表论文的发表时间）