Growth of Uniform Carbon Nanotube Arrays with Sandwich Technology

摘要：

In this wort we report a novel approach to grow structured, highly oriented Carbon Nanotubes (CNTs) that are vertically aligned to the substrate with adequate field emission. Growth is done at lithographically defined dots of catalysts, which can be deposited on metallic , semi-conducting and glass substrates. A sandwiched catalyst structure and microwave plasma chemical vapor deposition led to the formation of uniform CNT-arrays of 3 × 3 μm2. The method is easily scalable to large areas. The CNT-arrays exhibit a stable field emission of 20 mA and a current density of 50 mA/cm2 at a rather low electric field of 5. 33 V/μm.

关键词： Carbon Nanotubes Field Emission Microwave Plasma CVD Sandwich Growth

作者: Zexiang Chen Rainer Pietig Qiang Zhang Binjun Zhu Pingxiong Lan Tao Yu Daniel den Engelsen Peter K. Bachmann Irmgard Koehler Astrid Lewalter

作者单位: School of Opto-electronic Information, University of Electronic Science and Technology of China Chen PHI LI PS Research Laboratories, Weisshausstrasse 2,D-62066 Aachen, Germany

会议类型: 国际会议

会议名称: 2007亚洲显示国际会议（AD07）

会议地点: 上海

会议语种:英文

页码: 76-80

在线出版日期: 2007-03-12（万方平台首次上网日期，不代表论文的发表时间）