Advanced Processes for MEMS-based Displays
QUALCOMM MEMS Technologies is developing and commercializing a revolutionary MEMS-based technology for low power refractive displays. Concurrent with product development and manufacturing engineering in a TFT foundary in Taiwan , there are significant research activities in a state-of-the-art MEMS Research and Innovation Center in San Jose, California, to enable future technology generations. In this paper, we will overview iMoD fundamentals and the current status of the technology as well as discuss some research projects in the areas of advanced materials, processes and concepts for future MEMS displays manufacturing.
Reflective Displays MEMS Displays iMoD Nanoengineering ALD
Ana Londergan Evgeni Gousev Clarence Chui
QUALCOMM MEMS Technologies, MEMS Research and Innovation Center,2581 Junction Avenue, San Jose, CA 95134, U.S.A.
国际会议
上海
英文
107-112
2007-03-12（万方平台首次上网日期，不代表论文的发表时间）