Experimental Results on the Fabrication Parameters of ZnS:Mn Phosphor Layer in Inorganic Thick Dielectric Electroluminescent (TDEL) Displays
TDEL devices were fabricated at various ZnS: Mn phosphor fabrication parameters. ZnS: Mn phosphor of all devices was formed by electron beam evaporation from ZnS: Mn powder with 1.2 wt. ％ Mn content. The brightness of TDEL devices was affected by the phosphor fabrication parameters, such as deposition rate, substrate temperature and annealing temperature. The optimal deposition rate and substrate temperature were 5-8 (A)/s and 280℃, respectively, and led to the biggest brightness of TDEL devices. The luminescent properties of TDEL devices was improved by an annealing process of ZnS: Mn layer, and the most optimal brightness-voltage curve (that is, the biggest brightness and the steepest curve ) of TDEL devices was obtained by an annealing temperature of 500℃. The improvement of luminescent properties of TDEL devices by the optimal substrate temperature and annealing temperature of ZnS: Mn layer was attributed to the crystalline improvement of ZnS: Mn layer and the uniform diffusion of Mn +.
Thick Dielectric Film Inorganic Electroluminescent Display Brightness
Zhi-nong Yu Wei Xue Yu-rong Jiang Wei-qiang Lu
Department of optical Engineering, School of Information Engineering,Beijing Institute of Technology, Beijing 100081, China
国际会议
上海
英文
499-502
2007-03-12（万方平台首次上网日期，不代表论文的发表时间）