Nature of E-beam Evaporated Thin Films of MgO from Sol-gel Derived Powder for Dielectric Protection Application in Plasma Display Panels
The excellent emissive and protective properties of magnesium oxide are deteriorated by Mg( OH)2 formation through chemisorption of water. To address this issue, pure MgO powder has been first synthesized by a sol-gel process involving gel formation from solutions of magnesium nitrate hexahydrate and oxalic acid in ethanol, drying at 100℃ for 24 h to form magnesium oxalate dihydrate and decomposition at 600℃. The product is then subjected to grinding, sieving through a 240 mesh, pelletization and sintering at 1 000℃ for 2 h. The resulting MgO target has then been used to prepare thin films over a glass substrate by e-beara evaporation under vacuum ～10 -5 mbar. The MgO films as such and after annealing at 450℃ have been characterized for (a) phase and preferred orientation, (b) surface morphology, (c) optical transmit-tance, and (d) OH bond. They are shown to (i) possess an f. c. c. (Nad-type) structure with lattice parameter a～4.216±0.005 (A) and (ii) have preferred orientation along <100> and <110>. The films exhibit (i) pyramidal columnar morphology, (ii) high optical transmittance ( ＞ 88 - 92％ ) in visible region, and (iii) no signature of -OH bond. Further the hydration is effectively controlled if neutral planes like 100 and 110 bound the grains of MgO films.
MgO Thin Film Dielectric Protective Layer
Ashok Kumar Jitendra Kumar
Materials Science Programme, Indian Institute of Technology Kanpur, Kanpur-208016, India
国际会议
上海
英文
785-790
2007-03-12（万方平台首次上网日期，不代表论文的发表时间）