Drop Placement Optimization for Variable Pitch Multi-head Array Inkjet System for High Precision LCD Panel Fabrication
Drop placement accuracy is one of the most critical performance specifications of large platform inkjet systems for very demanding LCD panel processing such as color filter and spacer ball deposition. A well designed and manufactured system plus proper system setup procedure, error compensation techniques, drop placement characterization and printing optimization strategy are very important. Litrex has successfully developed systematic approaches with engineering solutions to address all these aspects, and has first ever laid down a foundation towards integrated metrology and advanced process control for inkjet mass production. In this paper, high drop placement accuracy performance of 15 urn (3σ) with variable pitch multi-head array Gen5.5 inkjet systems for LCD panel fabrication is presented.
Inkjet Variable Pitch Multi-head Drop Placement Accuracy Error sources Compensation Advanced Process Control
Tianzong Xu Wayne Huang Eugene Tan David Albertalli
Litrex Corporation, 6670 Owens Drive, Pleasanton, CA 94588, U.S.A.
国际会议
上海
英文
912-917
2007-03-12（万方平台首次上网日期，不代表论文的发表时间）