New Optical 3D-CD Metrology Techniques for Liquid Crystal Display Manufacture Inspection and Process Control

摘要：

White light interferometry technology provides unprecedented capability in FPD manufacture for simultaneous highspeed surface profiling and lateral dimensional metrology. In this paper, we introduce optical 3D-CD metrology techniques that offer better than 2 second per measurement with ≤20-nm (3-sigma) height reproducibility and ≤50-nm (3-sigma) CD/OL reproducibility in production line.

关键词： White Light Interferometry 3D-CD Metrology Flat Ranel Display Process Control

作者: Zhan He Jeff Zheng Ron Garden Peter de Groot

作者单位: Zygo Corporation and Subsidiaries, Laurel Brook Road,Middlefield, CT 06455, U.S.A.

会议类型: 国际会议

会议名称: 2007亚洲显示国际会议（AD07）

会议地点: 上海

会议语种:英文

页码: 959-963

在线出版日期: 2007-03-12（万方平台首次上网日期，不代表论文的发表时间）