Cell Measurement by Optimally Fitting of Reflective Spectrum
Reflective spectrum information of a vacant LCD cell was extracted to measure the gap of the vacant cell. Theoretically, the reflective spectrum of the cell shows the sinus form, the position of maximal peak depends on thickness of the gap. Vice versa, when the spectrum of the vacant cell had been measured, the peak point could be fitted by theoretical predicted peak of the correct gap. The software was made to search the correct gap , which should be optimally fit the peak of measured spectrum, and the result of the theoretical search was adapted as the result of measurement. Tungsten lamp was used as light source, and the angle of incidence light is 0°.Analysis shows that the measurable gap can cover from 5 μm to 30 μm, and experiments shown that the repeating error is less than 0.01 μm.
LCD Gap Reflecting Spectrum Optimal Fitting
Guizhen Kang Ziqiang Huang
University of Electronic Science and Technology of China, Chengdu 610054, China
国际会议
上海
英文
1144-1147
2007-03-12（万方平台首次上网日期，不代表论文的发表时间）