Enhancement and Analysis of the Optical Nano-diamond Film
Owing to its extremely excellent thermal and optical properties, nano-diamond film is expected to be used as the laser optical window in the projection television (PJTV). In this work, high quality nano-crystalline diamond films for optical windows have been successfully prepared on (100) silicon substrates using bias enhanced nucleation hot filament chemical vapor deposition (BEN-HFCVD) with 30 V negative bias voltage. It is found that the grown nano-diamond films have smooth surface with a root-mean-square surface roughness (RMS) of - 10 nm, and the transmittance of free-standing nano-diamond film get up to ～50％.
Nano-diamond Optical Properties Surface Roughness
Guang Hu Linjun Wang Xuefeng Zhu Jianmin Liu Jian Huang Jinyong Xu Yiben Xia
School of Materials Science and Engineering, Shanghai University,Shanghai 200072, China
国际会议
上海
英文
1762-1765
2007-03-12（万方平台首次上网日期，不代表论文的发表时间）