Modification of Work Function by Platinum and Tungsten Codoped Indium Oxide Thin Layer
Platinum and tungsten codoped indium oxide (In2O3: Pt,W) thin layers were prepared on tungsten-doped indium oxide (IWO) films by DC reactive magnetron sputtering. The effect of W-Pt codoping on work function of the surface was studied by ultraviolet photoelectron spectroscopy. It was confirmed that die work functions φ of IWO and IWO/In2O3: Pt, W thin films are 4.7 and 5.5 eV, respectively. The chemical states of platinum and tungsten in In2O3: Pt,W layers are in Pt atomic and W6+ ionic states. It is obviously that In2O3: Pt,W layer could increase the surface work function of die TCO films. Root mean square roughness of the films is less than 14 nm. And the initial experimental results show that the resistivity of IWO/In2O3: Pt,W double layer film reaches 5.7 ×10-4 ohm·cm and the average visible transmittance is over 85％.
Work Function Modification Codoped TCO
Guifeng Li Xifeng Li Qun Zhang Yinghua Wang Zhan Shi Ming Yang
Department of Materials Science, Fudan University, Shanghai 200433, China
国际会议
上海
英文
1799-1802
2007-03-12（万方平台首次上网日期，不代表论文的发表时间）