ITO Films Deposited by Thermionic-enhanced DC Magnetron Sputtering on Unheated Polyethylene Terephthalate Polymer Substrate
A hot filament system is coupled to DC magnetron sputtering system to provide thermionic emission which contributes to the intensified glow discharge. It is expected to obtain higher crystallinity of indium tin oxide (ITO) thin films grown onto polyethylene terephthalate (PET) substrate at low deposition temperature, Microstructures, electrical and optical properties as a function of film thickness were investigated without and with thermionic emission. Experimental results show that the films deposited with thermionic electron emission enhancement present a higher crystallinity in contrast to an amorphous feature of the deposited films without thermionic electron emission enhancement. ITO dun films deposited on PET by utilizing thermionic electron emission enhancement exhibit an average visible transmittance of 80％ and an electrical resistivity of 4.5 × 10 -4 Ω·cm, while it presents a 74％ visible transmittance and an electrical resistivity of 1.7 × 10 -3Ω·cm without the use of thermionic enhancement. The increased optical transmittance is ascribed to the reduced lattice scattering and the increased electrical conductivity is ascribed to the increased carrier mobility. Both result from the improved crystalline quality of the deposited ITO films by using thermionic emission.
ITO Thin Film Thermionic Enhancement DC Magnetron Sputtering Flexible Polymer Substrate
Y. F. Lan W. C. Peng Y. H. Lo J. L. He
Department of Materials Science and Engineering,Feng Chia University, Taichung, Taiwan, China
国际会议
上海
英文
1837-1842
2007-03-12（万方平台首次上网日期，不代表论文的发表时间）