Growth of Carbon Nanotubes Film on Pd Film by Chemical Vapor Deposition
The effect of different palladium (Pd) films on the growth behavior of carbon nanolubes (CNTs) film has been investigated. The CNTs film was deposited by thermal chemical vapor deposition (CVD) with C2H2 and H2 as precursor. Various Pd films prepared on glass substrates by magnetron sputtering in vacuum or O2 ambience were used as catalysts. Characterization of the Pd and CNTs films was made using scanning electron microscopy (SEM), field emission scanning electron microscopy (FESEM) and Energy dispersive X-ray spectroscopy (EDX). Results show thai it is difficult to grow CNTs on 10 nm to 40 nm thick Pd films deposited by magnetron sputtering in vacuum. However, on the as-prepared 10 nm thick Pd film after annealing treatment at 760℃ in atmosphere for 5 min, the randomly oriented CNTs and carbon nanofibres (CNFs) were grown, which were aligned in low density and gathered together into some particles. Also, the high purity CNTs were found to distribute evenly in high density on 10 nm thick Pd film deposited by magnetron sputtering in O2 ambience. The present work shows the importance of the preparation condition of the Pd film catalyst for the growth behavior of CNTs film.
Palladium Film Carbon Nanotubes Chemical Vapor Deposition
Zhangyi Cao Hongguang Wang Zhen Hua Zhuo Sun
SVA Electron Co., Ltd., Shanghai 200081, China Nanotech Center, East China Normal University, Shanghai 200062, China
国际会议
上海
英文
1920-1924
2007-03-12（万方平台首次上网日期，不代表论文的发表时间）