Surface topography of Large area mirror-like surfaces by the Makyoh (magic mirror) method
Makyoh or magic mirrors have been used in the Par East for centuries, they were large seemingly flat polished bronze disks, hanged usually on the walls of temples. These devices exhibit no noticeable structure on the front face, but when illuminated by the sun, the reflected image on the wall shows the strains, undulations of the mirror. Concave and convex distortions are represented by variations in intensity where convex distortions appear darker and concave ones brighter. These intensity variations are related directly to the radius of curvature of the corresponding irregularities. Unfortunately, similar darker and lighter patches can be produced by non-uniform irradiation or by the variation of the reflectivity. Therefore, in general a surface height profile can not be obtained from such a topogram of an arbitrary surface i.e. the method lacks quantitavity. Even by nonuniform irradiation quantitavity can be achieved by applying the Makyoh method modified by a projection of a grid to the wafer, where the grid nods mark the surface positions. The distorted image of this grid is analyzed to gain information on the flatness of the wafer. The method is applicable to any mirror like moderately distorted surface, among others to semiconductor wafers. The present paper discusses this technique.
surface topography Makyoh technique
Janos P. Makai Ferenc Riesz István E. Lukács Tamás Makai
Hungarian Academy of Sciences, Research Institute for Technical Physics and Material Science Budapes Department of Measurement and Information Systems, Faculty of Electrical Engineering and Informatics
国际会议
26th Session of the CIE(国际照明委员会（CIE）第26届大会)
北京
英文
270-273
2007-07-04（万方平台首次上网日期，不代表论文的发表时间）