Measurement of vacuum ultraviolet radiation using photoconductors made of synthetic diamond films
A new type of robust photoconductor made of synthetic diamond film was evaluated for measurement of vacuum ultraviolet (VUV) intensities of typical radiation sources such as ArF excimer laser (λ = 193 nm), xenon excimer (Xe*) lamps (λ = 172 nm), and low-pressure mercury lamps (λ = 185 nm).For a pulsed irradiation of an ArF excimer laser, the diamond sensors respond with rise and fall time of less than 10 ns. For the incoming energy between 10-6 and 10-3 J/pulse, they show a good linearity.The diamond sensors are also featured with its durability under severe VUV irradiation where conventional detectors can not be sustained. It was demonstrated that the diamond sensors stably operate for exceeding 700 hours under continuous irradiation of Xe* lamps of 10-40 mW/cm2. It was also observed in the temporal response measurement that the diamond photoconductors work diligently in accordance to the on/off of the Xe* lamps.It was also found that the diamond sensors, sensitive only to the 185 nm radiation among various emissions from low-pressure mercury lamps, are useful to monitor the dry cleaning process using the lamp irradiation. The contact angles of water droplets on glass substrates, that represent concentration of hydrocarbon contaminants on the surface, are well correlated with accumulated irradiance of 185 nm radiation, not that of conventionally measured 254 nm radiation.Through these evaluations, the diamond sensors were found useful for monitoring irradiation processes including not only dry-cleaning but photo-assisted chemical etching and/or deposition, surface pretreatment in flat panel display and semiconductor manufacturing, and water purification, for which there have been no method of in-situ/continuous measurement to control/confirm the VUV processing.
diamond film vacuum ultraviolet lamp photoconductor process monitoring
Hideaki Ishihara Kazushi Hayashi Takeshi Tachibana Kenichirou Ono Mikihiko Matsuoka
Iwasaki Electric Co., Ltd., Corporate Advanced Technology Center, 1-20 Fujimi-cho, Gyoda, Saitama 36 Kobe Steel, Ltd., Electronics Research Laboratory, 1-5-5 Takatsukadai, Nishi-ku, Kobe 651-2271 Japan
国际会议
26th Session of the CIE(国际照明委员会（CIE）第26届大会)
北京
英文
311-314
2007-07-04（万方平台首次上网日期，不代表论文的发表时间）