LiCoO2 Thin Film Cathode Fabrication by Rapid Thermal Annealing for Micro Power Sources
The rapid thermal annealing (RTA) process was employed to obtain crystalline LiCoO2 thin films. XRD analyses of the LiCoO2 thin film show increased crystallinity with an increase in the RTA time. The Auger electron spectroscopic analysis of the LiCoO2 film strongly suggests that the RTA process is more advantageous to obtain a stable inter layer between the substrate and the deposited film and between each deposited layer than the conventional annealing process. All-solid-state thin film cells composed of Li/Lithium phosphorous oxynitride (Lipon)/LiCoO2 system were fabricated using the LiCoO2 cathode treated with RTA. The optimum condition of RTA would be 900 s at 650℃, which exhibited a good rate capability for high power applications.
Sang Cheol Nam Ho Young Park
Nuricell Inc, 4F/GS Caltex New Energy Development Center,453-2 Seongnae-dong Gangdong-gu Seoul 134-030, South Korea
国际会议
深圳
英文
52-55
2007-01-17（万方平台首次上网日期，不代表论文的发表时间）