Microstructural and stress properties of ultrathin diamondlike carbon films during growth: Molecular dynamics simulations
The growth of ultrathin diamond-like carbon (DLC) films is modeled using molecular dynamics (MD) simulations with the reactive empirical bond order (REBO) potential. The microstructure and stress properties, such as film density, sp3 hybridization fraction and internal stress, are carefully analyzed. A close correlation of the film structure and its properties is revealed. By varying the kinetic energy of the incident atoms, a strong energy dependence of the microstructure and stress is found. An optimal incident energy in the range of 30～150eV should be reached to prepare homogeneous, continuous and compact DLC films. By studying the evolution of the film depth profile, the formation of intrinsic region is illustrated. A steady-state intrinsic region can be observed on condition that the film thickness exceeds a certain value, namely the minimum film thickness.
diamond-like carbon molecular dynamics thin films microstructure
TianBao Ma YuanZhong Hu Hui Wang Xin Li
State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
国际会议
杭州
英文
378-396
2007-04-01（万方平台首次上网日期，不代表论文的发表时间）