Electrostatic-structural coupling simulation of shuffle micro electro mechanical system by scratch drive actuator
Electrostatic-structural coupling plays an important role in the micro electro mechanical system (MEMS), Based on the electrostatic and structural theories, in this paper, a nonlinear coupling simulation model was established with the finite element method for a shuffle MEMS scratch drive actuator. Using the ANSYS software, the numerical simulation was constructed and the relation of character istic parameters between the shuffling displacement and controlling voltage was obtained.
Jing-jing Xu Xue-feng Li Xiao-jing Wang Xiu-rong Wang
College of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200072, China
国际会议
The 5th International Conference on Nonlinear Mechanics(第五届国际非线性力学会议)
上海
英文
526-531
2007-06-11（万方平台首次上网日期，不代表论文的发表时间）