A novel MEMS optical gyroscope
This paper proposed an innovative design of micro optic gyroscope based on MEMS structures and optic interferometric micro-displacement measurement. The gyroscope consists of micro vibrator and interferometric read-out. Using Coriolis force, the vibrator transfers the system rotation into a forced vibration, the induced vibration can be sensed by the interferometric micro-displacement measurement system. The optic measurement system has two mirrors which reflects two rays into a detector. The paper has done comprehensive studies on the formulation and analysis of the proposed gyroscope, two key sensor equations have been derived in the first time: 1) Relation between rotation and phase deference of two rays △ψ=(4πl0)/(λ)+(8π)/(λ)(xmaxQy)/(ωy)Ω(t)sin(ωdt);2)Relation between rotation and interferometric intensity of light I(t)≈(8π)/(λ)(xmaxQy)/(ωy)Ω(t)sin(ωdt)sin((4πl0)/(λ)). A comparison of the proposed gyroscope with well-know Sagnac formulation has been investigated, and it is shown that the proposed model is much better man Sagnac ones, since the new model has nothing with very long fiber in the case of Sagnac gyroscope. The innovative model gives a new hope to fabricate high accurate and cheaper gyroscope.
Bo-hua Sun Bo Zhang
Department of Mechanical Engineering, Cape Peninsula University of Technology, Bellville 7535, Cape Town,South Africa; Jinan University, China
国际会议
The 5th International Conference on Nonlinear Mechanics(第五届国际非线性力学会议)
上海
英文
666-671
2007-06-11（万方平台首次上网日期，不代表论文的发表时间）