Piezoelectric AlN thin films synthesized by midfrequency dualtarget magnetron sputtering
A1N thin films were deposited on Si(111) substrates by midfrequency dualtarget magnetron sputtering. X-ray diffraction (XRD) and atomic force microscopy (AFM) are employed to characterize the AIN thin films. In order to control structure and roughness of the films for high frequency surface acoustic wave (SAW) devices, the influences of different processing parameters were investigated. It was found that substrate temperature and annealing temperature have a great effect on the microstructure and surface morphology of the films.
Pu Chen Qi-cai Peng Bin-guang Zhao Lun Zeng Ke-qiang Deng Hui-zhong Deng De-wu Yao
School of Material Science and Engineering, Xihua University, Chengdu 610039, China Southwest Institute of Technical Physics, Chengdu 610041, China
国际会议
The 5th International Conference on Nonlinear Mechanics(第五届国际非线性力学会议)
上海
英文
1592-1596
2007-06-11（万方平台首次上网日期，不代表论文的发表时间）