Elastic Modulus of Nanometer Silicon Membrane

摘要：

In this article, a new method is presented to calculate the in-plane elastic modulus of nanometer silicon membrane. In comparing with the traditional model, it accounts for the discrete nature in the thickness direction of the silicon membrane. In this model, interatomic bonding forces are equivalent to spring forces. A method to obtain the spring constant k is also presented by using lattice dynamics theory. Investigating the obtained in-plane elastic modulus value, it is found that the value is highly dependent on the thickness of the membrane and approaches the bulk value as the thickness increases.

关键词： membrane elastic modulus semicontinuum

作者: Fang Bao Hong Yu Qing-an Huang

作者单位: Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China

会议类型: 国际会议

会议名称: 2006 IEEE International Conference on Information Acquisition

会议地点: 山东威海

会议语种:英文

页码: 85-90

在线出版日期: 2006-08-20（万方平台首次上网日期，不代表论文的发表时间）