Effect of adsorption-desorption on resonant frequency of the nano beam
The effect of adsorption-desorption on the characteristic of the doubly clamped nano beam is analyzed theoretically by considering the mass variation resulted from adsorption. The frequency shift is obtained and compared with the effect of air damping. It is shown that the frequency shift which is induced by the effect of adsorption is about 1‰, much higher than the effect of air damping.The relationships between frequency shift and pressure, temperature and beam size are also given out. The results have shown that nano-scale beam is more susceptible to adsorption-desorption noise than bulk mechanical beam.
Tongqing Liu Hong Yu Qing-an Huang
Key laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China
国际会议
2006 IEEE International Conference on Information Acquisition
山东威海
英文
96-100
2006-08-20（万方平台首次上网日期，不代表论文的发表时间）