A Kind of Shock Resistance Method on Silicon Micro-Machined Gyroscope

摘要：

This paper reported a silicon micro-machined gyroscope that is driven by the rotating carriers angular velocity; this gyroscope was manufactured by micro-electronic fabrication and bulk Si etching technology Using electrode position restricting, resin packing, “sandwich structure and latex flake, the shock resistance of gyroscope can reach 5000g. The measured results showed that the gyroscope has good consistency and repetitiousness.

关键词： Micro-machined gyroscope Shock resistance.

作者: Xu MAO Liang MING Yu LIU Fuxue ZHANG

作者单位: Research Centre of Sensors Electronics Institute, Beijing Information Technology Institute,Beijing, China (100101)

会议类型: 国际会议

会议名称: 2006 IEEE International Conference on Information Acquisition

会议地点: 山东威海

会议语种:英文

页码: 101-105

在线出版日期: 2006-08-20（万方平台首次上网日期，不代表论文的发表时间）