A Quartz tuning fork-based humidity sensor using Nanocrystalline Zinc oxide thin film coatings
This paper describes an application of quartz tuning forks (QTF) coated with nanocrystalline ZnO films used as relative humidity sensors. The nanocrystalline ZnO thin films were deposited on the QTF by sol-gel method. The film was characterized by X-Ray Diffraction (XRD) and Atomic Force Microscope (AFM) to obtain the information on the structural and morphological properties. And the humidity sensitivity characteristics of the sensors have been investigated. Ethanol and acetone interference on the sensor performance have been also tested. Sensing experiments were examined by measuring the resonance frequency shift of QTF which due to the additional mass loading. The results showed that the sensors have high humidity sensitivity, good stability,fast response time, and well reproducibility. We demonstrate here a simple and low-cost humidity sensor using the QTF.
humidity sensor relative humidity quartz tuning fork Zinc oxide thin film sol-gel
Xiaofeng Zhou Tao Jiang Jian Zhang Jianzhong Zhu Xiaohua Wang Ziqiang Zhu
Department of Electrical Engineering, East China Normal University, 3663 North Zhongshan Road, Shanghai 200062, China
国际会议
2006 IEEE International Conference on Information Acquisition
山东威海
英文
1152-1157
2006-08-20（万方平台首次上网日期，不代表论文的发表时间）