Powder Sputtered SnO2, ZnO Thin Film Gas Sensors

摘要：

Powder sputtering method has the advantage of doping impurity stability. Some performances of SnO2，ZnO gas sensing thin film and the idea of designing gas sensor are introduced. The processing, techniques, chip structure and performance about two kinds of thin film gas sensors are given out. Simultaneously, we got two conclusions: the first one, metal oxide thin film sensor obtained by the powder sputtering method is likely to become popular goods in the field of gas sensors; the other one, ZnO thin film is another gas sensor basic material besides SnO2 that can be studied and developed. The key for ZnO thin film sensor is to choose the suitable substrate.

作者: Xing Jianping Zhou Lei Hong Debin Sun Jingjing Qiu Nanwan

作者单位: School of Information Science and Engineering, Shandong University, Jinan, 250100 China School of Physics and Microelectronics, Shandong University, Jinan, 250061 China

会议类型: 国际会议

会议名称: 2006 IEEE International Conference on Information Acquisition

会议地点: 山东威海

会议语种:英文

页码: 1305-1310

在线出版日期: 2006-08-20（万方平台首次上网日期，不代表论文的发表时间）