Thermal-Power Consumption and Heat Transfer Coefficients in Micro-thin-film Gas Sensors

摘要：

The thermal-power consumption is a important parameter of gas sensor. The temperature distribution of thin film gas sensor, temperature of metal guard, the dissipating heat of lead-wires and the regularity of sensors heat transfer coefficient varying with size of heat-transfer surface and working temperature was studied. The formula of thermal-power consumption of micro-thin-film gas sensors yielded in this paper, from which, the calculation results consisted with the experiment. Finally, some related problems were discussed.

作者: Liu Xiaojian Qu Lu Li Donghua Xing Jianping Qiu Nanwan

作者单位: Jinan Semiconductor Institute Jinan, 250013 China School of Information Science and Engineering, Shandong University Jinan, 250100 China School of Physics and Microelectronics, Shandong University Jinan, 250014 China

会议类型: 国际会议

会议名称: 2006 IEEE International Conference on Information Acquisition

会议地点: 山东威海

会议语种:英文

页码: 1311-1315

在线出版日期: 2006-08-20（万方平台首次上网日期，不代表论文的发表时间）