Experiment and Theory for the Thickness Effect of Nano Metal Oxide Gas Sensing Thin Film <Ⅱ> Optimum Size of Crystal Grains and Theory of Mesoscopic Effect
The existence of the optimum film thickness and optimum grain size of nano metal oxide gas sensing thin films is given by experiment results. The existence of the optimum grain size is examined theoretically to be a new mesoscopic effect, resulting from the failure of Fermi statistic law of the adsorbed negative oxygen ion concentration when the grain size reduces to a certain range. According to Kubos theory that as the grain size reduces to a characteristic length rm the grain would be neutrality, Fermi statistics is modified, and therefore, the theoretical result of the optimum grain size ro*=2rm is yielded. With the Kubos formula of electron work function, the values of rm and ro* can be estimated, which consist with the experimental results.
Lu Honglang Sun Jingjing Xing Jianping Liu Wenli Qiu Nanwan
School of Mechanical Engineering, Jinan University Jinan, 250022 China School of Information Science and Engineering, Shandong University Jinan, 250100 China School of Physics and Microelectronics, Shandong University Jinan, 250100 China
国际会议
2006 IEEE International Conference on Information Acquisition
山东威海
英文
1454-1459
2006-08-20（万方平台首次上网日期，不代表论文的发表时间）