Experiment and Theory for the Thickness Effect of Nano Metal Oxide Gas Sensing Thin Film <Ⅲ> The Thickness Effect and Mesoscopic Theory of Conductance Activity Energy

摘要：

The Characteristics of Conductance activity energy of SnO2 thin film varies with film thickness l and grain size ro are given by experiment results. The cross-section current formula of porous materials and the conductance formula of gas sensing thin film with adsorbed oxygen negative ion are given. The mesoscopic theory of nano-thin film conductance activity energy was proposed, and using the corrected Fermi statistic formula for the concentration of adsorbed negative ion, the theoretical curve of Eact varies with grain size ro yield; from which, the related problems are discussed.

作者: Xing Jianping Yuan Qinghua Li Donghua Lu Honglang Qiu Nanwan

作者单位: School of Information Science and Engineering, Shandong University, Jinan, 250100 China School of physics and microelectronics, Shandong University, Jinan,250014 China Jinan Semiconductor Institute, Jinan, 250013 China School of Mechanical Engineering, Jinan University, Jinan , 250022 China

会议类型: 国际会议

会议名称: 2006 IEEE International Conference on Information Acquisition

会议地点: 山东威海

会议语种:英文

页码: 1460-1464

在线出版日期: 2006-08-20（万方平台首次上网日期，不代表论文的发表时间）