Study on the Preparation of ZYO Thin Films by Middle Frequency Alternative Magnetron Sputtering and Their Properties

摘要：

Y-doped zinc oxide (ZYO) thin films were prepared by middle frequency alternative magnetron sputtering on glass substrates with ZYO ceramic targets. The influences of Y2O3 content and substrate temperature on microstructures, optical and electrical properties of the thin films have been investigated. The results show that the ZYO films are of the structure of wurtzite type with high c-axis orientation. The lowest resistivity of the films in this work is 1.18 × 10-3Ωcm with the transmittance of over 80％ at the visible region.

关键词： ZYO magnetron sputtering transparent conductive film transmittance resistivity

作者: SUN Ruo-nan ZHUANG Da-ming ZHANG Gong

作者单位: Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China

会议类型: 国际会议

会议名称: 2006中日稻米品质测控及美味技术学术研讨会

会议地点: 北京

会议语种:英文

页码: 39-40

在线出版日期: 2006-08-03（万方平台首次上网日期，不代表论文的发表时间）