Influence of Ion Beam Assistance on Properties of Nitrogen-doped Titania Films Deposited by Cathodic Vacuum Arc
A nitrogen-doped titania film was prepared by cathodic vacuum arc method with ion-beam assistance in a mixed oxygen/nitrogen gas atmosphere. The effect of the ion beam current on the structural, optical properties and photocatalytic activity of nitrogen-doped titania film was studied. The as-deposited films were subjected to annealing with the atmospheric environment, and the change of film properties after annealing was investigated. The structures of all as-deposited films were amorphous. In the annealing process, the ion-beam-assisted nitrogen-doped titania films had a phase transition from amorphous to anatase polycrystalline with a strong TiO2 ana-tase (101) peak at a temperature of 500℃. When the ion-beam assistance was applied, the deposited nitrogen-doped titania films were found to the spectrum response of nitrogen-doped titania film deposited with ion beam assisted extended to the visible region, photocatalytic activity of nitrogen-doped titania film decreases with ion beam current increase from 80 to 160mA.
ion beam assisted deposition titania Film nitrogen doped photocatalysis
CHENG Xiao-ling HU She-jun XIE Guang-rong ZENG Peng
School of Chemical Engineering and Light Industry, Guangdong University of Technology,Guangzhou 5100 School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510006 School of Materials and Energy Sources, Guangdong University of Technology, Guangzhou 510090, China
国际会议
北京
英文
203-205,214
2006-08-03（万方平台首次上网日期，不代表论文的发表时间）