Development of compact SEM equipped with carbon nanotube field emission cathode

作者: Ryosuke Yabushita Koichi Hata Hideki Sato Yahachi Saito

作者单位: School of Engineering, Mie University, 1577 Kurima-machiya, Tsu 514-8507, Japan Graduate School of Engineering, Nagoya University, Furo, Chikusa, Nagoya 464-8603, Japan

会议类型: 国际会议

会议名称: 19Th International Vacuum Nanoelectronics Conference & 50th International Field Emission Symposium(第19届真空微纳国际年会暨第50届场致发射国际会议)

会议地点: 桂林

会议语种:英文

页码: 427-428

在线出版日期: 2006-07-17（万方平台首次上网日期，不代表论文的发表时间）