Study of application penetrating surface method in SEM to detect IC with insulator layer Si3N4+ SiO2

作者: Wenguo Hu E.I.Rau Ling Xiao Yiping Lin Zhuguan Liang Yawen Li Ping Li Dechun Lan Jian Wang Kailin Zhou

作者单位: Physics and Technology College, Yunnan University, Kunming, 650091, china MSU, Moscow, Russia Information College, Yunnan University, Kunming, 650091, china Kunming Institute of Physics, Kunming, 650223, China

会议类型: 国际会议

会议名称: 19Th International Vacuum Nanoelectronics Conference & 50th International Field Emission Symposium(第19届真空微纳国际年会暨第50届场致发射国际会议)

会议地点: 桂林

会议语种:英文

页码: 487-488

在线出版日期: 2006-07-17（万方平台首次上网日期，不代表论文的发表时间）