Study on the internal damage of semiconductor devices and external damage of insulator layers

作者: Wenguo Hu Yiping Lin Zhuguan Liang Ling Xiao Yawen Li Ping Li Jian Wang Kailin Zhou E.I.Rau

作者单位: Department of Physics, Yunnan University, Kunming, 650091, china Department of Electrical Engineering, Yunnan University, Kunming, 650091, china Kunming Institute of Physics, Kunming, 650223, China MSU, Moscow, Russia

会议类型: 国际会议

会议名称: 19Th International Vacuum Nanoelectronics Conference & 50th International Field Emission Symposium(第19届真空微纳国际年会暨第50届场致发射国际会议)

会议地点: 桂林

会议语种:英文

页码: 489-490

在线出版日期: 2006-07-17（万方平台首次上网日期，不代表论文的发表时间）