GaBi liquid metal alloy ion source for the production of ions of interest in microelectronics Research
L. Bischoff W. Pilz Th. Ganetsos R. Forbes Ch. Akhmadaliev
Institute of Ion Beam Physics and Materials Research, Research Center Rossendorf Inc., P.O. Box 5101 Department of Electronics, Technological Educational Institute of Lamia, 3rd Km O.N.R. Lamia-Athens, University of Surrey, Advanced Technology Institute, School of Electronics and Physical Sciences, Gu
国际会议
桂林
英文
547-548
2006-07-17(万方平台首次上网日期,不代表论文的发表时间)