Silicon Photonic Crystal Waveguide Modulators and Applications in Board-Level Optical Interconnect Invited Plenary Session Paper
The availability of passive and active optical devices on silicon substrate represents a synergestic effort o f building a silicon based optoelectronic plat form using silcion CMOS process. In this paper, ultra-co mpact photonic-cryst al-waveguide bas ed ther mal-optic and electro -optical Mach- Zehnd er silicon modulators hav e been propos ed and fabricated . Ther mal and el ectrical simul ations have been per for med. Realizing the fact th at silicon is an indirect bandgap material, we further present the architecture for system integ ration with Ⅲ-V semicondu ctor l asers.
Ray T. Chen Lanlan Gu Wei Jiang
Microelectronic Res earch Center, Department of El ectrical and Computer Engineering,The University Microelectronic Res earch Center, Department of El ectrical and Computer Engineering,Omega Optics In
国际会议
成都
英文
4-8
2006-09-18(万方平台首次上网日期,不代表论文的发表时间)