FABRICATION OF HIGH ASPECT RATIO PERIODICAL STRUCTURE ON METAL USING AN ELECTROFORMING PROCESS

摘要：

A procedure for fabricating a periodic structure on a UV polymer at submicron order using holographic interferometry and molding processes is described.First, holographic interference using a He-Cd (325nm)laser was used to create the master of the periodic line structure on an i-line sub-micron positive photoresist film. A 200nm nickel thin film was then sputtered onto the positive photoresist. Pattern was then transferred to a metal using Nickel-Cobalt electroforming. Initial results show the technique can accurately control the gratings period and depth.

作者: Wei-Ching Chuang Chou-Hsiung Wu Yi-Kai Lin Ching-Kong Chao Wen-Chung Chang Kao-Feng Yarn Chi-Ting Ho

作者单位: Department of Electro-Optics Engineering National Formosa University, Huwei, Yulin, Taiwan Department of Mechanical Engineering National Taiwan University of Science and Technolog Department Department of Electronic Engineering Southem Taiwan University of Technology Department of Mechanical Design Engineering National Formosa University, Huwei, Yulin, Taiwan

会议类型: 国际会议

会议名称: The 5th International Conference on Optical Communications and Networks & the 2nd International Symposium on Advances and Trends in Fiber Optics and Applications(第5届国际光通信与网络年会暨第2届纤维光学发展现状与未来趋势国际学术研讨会)

会议地点: 成都

会议语种:英文

页码: 81-83

在线出版日期: 2006-09-18（万方平台首次上网日期，不代表论文的发表时间）